We provide a full range of support offerings in order to meet your specific needs.
Parts replacementTrouble ShootingData analyze
We’re preparing the inspection tools for the customer.
・Line Narrowing Module
・Wavelength Stabilization Module
We’re supporting the following support models.
・Blower Motor Controller
・24V DC Power supply
About ELR Corp
1.ELR Corp is offer repaired and Refurbished the Cymer laser products for the following laser models.
2.ELR Corp has inspection, test system repaired or refurbished Cymer laser products.
3.Refurbished parts are apply the same warranty period of the OEM refurbished products.
Stepper Parts Service
We offer the parts or optics of Stepper/Scanner as customer required.
・Optics: Filters, Cover glass, sheet glass for the i-Line/g-line Stepper and Excimer Stepper
Please feel free to ask.+81-957-49-6100Reception Time 9:00 A.M. to 17:00 P.M.(Flexible) [Sun, Sat, and holidays are closed. ]