Inventory List in Japan (ELS-5K, ELS-6K)
| Parts Name | ELS-5K | ELS-6K | |
|---|---|---|---|
| Core Module | Laser Discharge Chamber Line Narrowing Module Wavelength Stabilization Module |
〇 〇 〇 |
〇 － － |
| Consumable | Output Coupler 20% Beam Splitter F2Trap |
〇 〇 〇 |
〇 〇 〇 |
| Support Module | Blower Motor Controller H.V.P.S Commutation Module Compression Head Module Cooling Module Vacuum Pump |
〇 〇 〇 〇 〇 〇 |
〇 － － － 〇 〇 |
| Support Parts | 24VDC Power Supply Circuit Board Pressure Sensor chamber Pressure Sensor Manifold Pressure Sensor Vacuum Actuator Particle Filter Window Kit Bearing Kit |
〇 〇 〇 〇 〇 〇 〇 〇 〇 |
〇 〇 〇 〇 〇 〇 〇 〇 〇 |