Inventory List in Japan (ELS-5K, ELS-6K)

Parts Name ELS-5K ELS-6K
Core Module Laser Discharge Chamber
Line Narrowing Module
Wavelength Stabilization Module




Consumable Output Coupler 20%
Beam Splitter
F2Trap




Support Module Blower Motor Controller
H.V.P.S
Commutation Module
Compression Head Module
Cooling Module
Vacuum Pump










Support Parts 24VDC Power Supply
Circuit Board
Pressure Sensor chamber
Pressure Sensor Manifold
Pressure Sensor Vacuum
Actuator
Particle Filter
Window Kit
Bearing Kit